• DocumentCode
    2249454
  • Title

    Channel waveguide formed by “One Shot” implantation of He+ ions

  • Author

    Ilan, Har´el ; Gumennik, Alexander ; Perepelitsa, Galina ; Israel, Abraham ; Agranat, Aharon J.

  • Author_Institution
    Dept. of Appl. Phys., Hebrew Univ. of Jerusalem, Jerusalem
  • fYear
    2008
  • fDate
    4-9 May 2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Channel waveguide was fabricated in a KLTN crystal. The waveguide was produced by a selective implantation of He+ ions into the crystal through a gold stopping mask, which created a trough shaped cladding.
  • Keywords
    helium; ion implantation; lithium compounds; optical fabrication; optical waveguides; potassium compounds; He; KLTN crystal; KLi(TaNb)O3; channel waveguide; gold stopping mask; ion implantation; trough shaped cladding; Amorphous materials; Circuits; Crystal microstructure; Crystallization; Electrooptical waveguides; Gold; Helium; Optical device fabrication; Optical waveguides; Photonic crystals; (220.4000) Microstructure fabrication; (250.3140) Integrated optoelectronic circuits;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-55752-859-9
  • Type

    conf

  • Filename
    4572018
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2249454