• DocumentCode
    2249490
  • Title

    Characteristics of hard DLC film formed by gas cluster ion beam assisted deposition

  • Author

    Kanda, Kazuhiro ; Kitagawa, Teruyuki ; Shimizugawa, Yutaka ; Haruyama, Yuichi ; Matsui, Shinji ; Terasawa, Mititaka ; Tsubakino, Harushige ; Yamada, Isao ; Gejo, Tatsuo ; Kamata, Masao

  • Author_Institution
    Lab. of Adv. Sci. & Technol. for Ind., Himeji Inst. of Technol., Hyogo, Japan
  • fYear
    2001
  • fDate
    Oct. 31 2001-Nov. 2 2001
  • Firstpage
    112
  • Lastpage
    113
  • Abstract
    DLC films formed by gas cluster ion beam (GCIB) assisted deposition were investigated by NEXAFS using synchrotron radiation.
  • Keywords
    EXAFS; carbon; ion beam assisted deposition; synchrotron radiation; thin films; C; GCIB assisted deposition; NEXAFS; gas cluster ion beam assisted deposition; hard DLC film; synchrotron radiation; Acceleration; Amorphous materials; Argon; Atomic layer deposition; Chemical industry; Chemical technology; Diamond-like carbon; Ion beams; Organic materials; Resonance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2001 International
  • Conference_Location
    Shimane, Japan
  • Print_ISBN
    4-89114-017-8
  • Type

    conf

  • DOI
    10.1109/IMNC.2001.984114
  • Filename
    984114
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2249490