Title :
Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction
Author :
Moon, Songky ; Shim, Jeong-Bo ; Lee, Sang-Bum ; Yang, Juhee ; Kim, Sang-Wook ; Lee, Jai-Hyung ; An, Kyungwon
Author_Institution :
Sch. of Phys. & Astron., Seoul Nat. Univ., Seoul
Abstract :
We have found that the angular width between two adjacent local minima on the forward diffraction pattern of an opaque convex object is inversely proportional to the projection width of the object in that diffraction direction. Based on this finding we have developed a nondestructive two-dimensional surface mapping technique with a 20-nm resolution.
Keywords :
light diffraction; opacity; surface topography measurement; 2-D opaque microscopic object; forward shadow diffraction; nondestructive 2-D surface mapping technique; opaque convex object; Electromagnetic scattering; Microcavities; Microscopy; Moon; Optical diffraction; Optical scattering; Optical surface waves; Physics; Shape; Surface reconstruction;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391662
