Title :
Addressing the needs of complex MEMS design
Author :
Clark, J.V. ; Bindel, D. ; Kao, W. ; Zhu, E. ; Kuo, A. ; Zhou, N. ; Nie, J. ; Demmel, J. ; Bai, Z. ; Govindjee, S. ; Pister, K.S.J. ; Gu, M. ; Agogino, A.
Author_Institution :
Dept. of Appl. Sci. & Technol., California Univ., Berkeley, CA, USA
Abstract :
In this paper, we report several advances in the Sugar2.0 MEMS system simulation package, including reduced-order modeling techniques, simple hierarchical description of complex structures, synthesis tools, a variety of models, and a web-based interface. Examples include the modeling of a torsional micromirror with lateral actuators compared to experiment, and the prototyping of a microrobot.
Keywords :
CAD; micro-optics; microactuators; micromechanical devices; microrobots; mirrors; reduced order systems; CAD; MEMS design; Sugar2.0 package; complex structure; computer simulation; hierarchical model; lateral actuator; microrobot prototyping; reduced-order model; synthesis tool; torsional micromirror; web-based interface; Actuators; Computational modeling; Computer science; Design automation; Equations; Mathematical model; Micromechanical devices; Micromirrors; Packaging; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984240
