Title :
Saving energy and natural resource by micro-nanomachining
Author_Institution :
New Ind. Creation Hatchery Center, Tohoku Inst. of Technol., Sendai, Japan
Abstract :
Micro-nanomachining technologies have been studied with the aim of saving energy and natural resources. Wafer process packaging using electrical feedthrough in glass has been applied to micromechanical sensors as electrostatically levitating micro motors (10,000 rpm) for rotational gyroscopes. Maintenance tools as active catheters have been developed to be used in narrow space for extended life. Technologies for compact power source as fabrication of ceramic microstructures using silicon mold and as measurement of hydrogen storage capacity of carbon nanotube were developed.
Keywords :
carbon nanotubes; electrostatic devices; elemental semiconductors; gyroscopes; micromachining; micromotors; microsensors; nanotechnology; semiconductor device packaging; silicon; Si; active catheters; carbon nanotube; ceramic microstructures; compact power source; electrical feedthrough; electrostatically levitating micro motors; energy resources; hydrogen storage capacity; micro-nanomachining; micromechanical sensors; rotational gyroscopes; silicon mold; wafer process packaging; Catheters; Ceramics; Fabrication; Glass; Gyroscopes; Micromechanical devices; Micromotors; Microstructure; Packaging; Space technology;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984243
