Title :
Hybrid mounted micromachined aluminium hot-wire for near-wall turbulence measurements
Author :
Haasl, S. ; Mucha, D. ; Chernoray, V. ; Ebefors, T. ; Enoksson, P. ; Lofdahl, L. ; Stemme, G.
Author_Institution :
Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
Abstract :
We present the first micromachined metal hot-wire anemometer sensor for use in near-wall turbulence measurements. To measure close to the surface without the circuitry interfering with the flow, a novel hybrid assembly of the sensor has been developed. We present the design, fabrication and characteristics of this sensor.
Keywords :
anemometers; micromachining; microsensors; turbulence; Al; anemometer sensor; fabrication; hybrid assembly; hybrid mounted hot-wire; micromachined hot-wire; near-wall turbulence measurements; sensor characteristics; Aluminum; Electric resistance; Electrical resistance measurement; Fabrication; Fluid flow measurement; Sensor phenomena and characterization; Sensor systems; Thermal sensors; Velocity measurement; Wire;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984271
