Title :
Field-operable microconnections using automatically-triggered localized solder-bonding
Author :
Lemmerhirt, D.F. ; Wise, K.D.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
This paper presents an approach to realizing high-density electrical and mechanical connections to delicate microstructures in the field. "Smart" pads automatically detect proper contact alignment and activate a local heating element to create solder bonds between the pads and the pre-soldered lead tabs of a miniature flexible cable. The bonds occur in 350 ms and result in less than 10 /spl Omega/ of series resistance between the cable and the pad. Connections have been demonstrated with lead-pitches as small as 100 /spl mu/m and connection areas of less than 0.375 mm/sup 2/ per pad. The pad areas are fabricated with a five-mask circuit-compatible process. The flexible ribbon cables are made of polyimide with copper conductors. This work represents the first use of localized solder-bonding for making connections between microstructures and silicon substrates.
Keywords :
micromechanical devices; soldering; Cu; Si; automatically-triggered localized solder-bonding; copper conductor; electrical connection; field-operable microconnection; five-mask circuit-compatible process; mechanical connection; polyimide flexible ribbon cable; series resistance; silicon microstructure; smart pad; Cables; Circuits; Conductors; Contacts; Copper; Heating; Lead; Microstructure; Polyimides; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984288