Title :
A rotational comb-driven micromirror with a large deflection angle and low drive voltage
Author :
Tsuboi, O. ; Mizuno, Y. ; Koma, N. ; Soneda, H. ; Okuda, H. ; Ueda, S. ; Sawaki, I. ; Yamagishi, F.
Author_Institution :
Fujitsu Labs. Ltd., Japan
Abstract :
We have designed, fabricated, and tested a V-shaped torsion bar for use with a comb-driven micromirror. This torsion bar suppressed undesired sticking of the comb teeth, and enabled a large rotational angle and a low drive voltage. We observed 5-degree rotation of a comb-driven micromirror with a drive voltage of 90 V.
Keywords :
micro-optics; mirrors; torsion; 90 V; V-shaped torsion bar; deflection angle; drive voltage; rotational comb-driven micromirror; Bars; Electrostatic actuators; Fabrication; Laboratories; Low voltage; Micromirrors; Mirrors; Springs; Teeth; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-7803-7185-2
DOI :
10.1109/MEMSYS.2002.984326
