• DocumentCode
    2256348
  • Title

    Optimization of SiNx planar microdisk high Q resonators for chipscale visible integrated photonics

  • Author

    Hosseini, Ehsan Shah ; Yegnanarayanan, Siva ; Soltani, Mohammad ; Adibi, Ali

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA
  • fYear
    2008
  • fDate
    4-9 May 2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Ultra-high Q (>5 times 105) microdisk resonators are demonstrated in a SiNx platform at 650 nm with integrated in-plane coupling waveguides on a Si substrate. Critical coupling to first-order radial-mode is demonstrated using pedestal layer to control coupling.
  • Keywords
    integrated optoelectronics; micro-optics; optical couplers; optical materials; optical planar waveguides; optical resonators; silicon compounds; visible spectra; Si; SiNx; chip-scale visible integrated photonics; first-order radial mode coupling; integrated in-plane coupling waveguides; pedestal layer; ultra-high Q microdisk resonators; wavelength 650 nm; Etching; Optical coupling; Optical materials; Optical refraction; Optical resonators; Optical waveguides; Photonics; Q factor; Silicon; Waveguide discontinuities; (130.3120) Integrated optics devices; (230.5750) Resonators;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-55752-859-9
  • Type

    conf

  • Filename
    4572334
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2256348