Title :
Space-grown SI-GaAs and its application
Author :
Chen, NuoFu ; Zhong, Xingru ; Zhang, Mian ; Lin, Lanying
Author_Institution :
Lab. of Semicond. Mater. Sci., Chinese Acad. of Sci., Beijing, China
fDate :
30 June-5 July 2002
Abstract :
A semi-insulating GaAs single crystal ingot was grown in a recoverable satellite, within a specially designed pyrolytic boron nitride crucible, in a power-travelling furnace under microgravity. The crystal was characterized systematically and was used in fabricating low noise field effect transistors and analogue switch integrated circuits by the direct ion-implantation technique. All key electrical properties of these transistors and integrated circuits have surpassed those made from conventional earth-grown gallium arsenide. This result shows that device-grade space-grown semiconducting single: crystal has surpassed the best terrestrial counterparts. Studies on the correlation between SI-GaAs wafers and the electronic devices and integrated circuits indicate that the characteristics of a compound semiconductor single crystal depends fundamentally on its stoichiometry.
Keywords :
Hall mobility; III-V semiconductors; analogue integrated circuits; electrical resistivity; field effect transistors; gallium arsenide; ion implantation; GaAs; SI GaAs wafers; analogue switch integrated circuit; crystal ingot; electrical properties; electronic device; field effect transistors; gallium arsenide; integrated circuit; ion implantation; microgravity; power travelling furnace; pyrolytic boron nitride crucible; semiconductor crystal; space grown SI GaAs; stoichiometry; Analog integrated circuits; Boron; FETs; Furnaces; Gallium arsenide; Integrated circuit noise; Power semiconductor switches; Satellites; Semiconductor device noise; Switching circuits;
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
DOI :
10.1109/SIM.2002.1242714