• DocumentCode
    2257130
  • Title

    Electronic spectrum of defects in SiOCH dielectric films measured by deep level transient spectroscopy

  • Author

    Ligatchev, V.A. ; Wong, T.K.S. ; Liu, B. ; Rusli

  • Author_Institution
    Nanyang Technological University
  • fYear
    2002
  • fDate
    30 June-5 July 2002
  • Firstpage
    147
  • Lastpage
    150
  • Keywords
    Atomic measurements; Dielectric films; Dielectric materials; Dielectric measurements; Electrochemical impedance spectroscopy; Electrons; Plasma applications; Radio frequency; Semiconductor films; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
  • Print_ISBN
    0-7803-7418-5
  • Type

    conf

  • DOI
    10.1109/SIM.2002.1242744
  • Filename
    1242744
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2257130