• DocumentCode
    2257337
  • Title

    Fabrication of self-organized carbon nanotubes on si substrates using nano-template by flame synthesis technique

  • Author

    Chen, Zhi ; Hu, Wenchong ; Yuan, Liming ; Saito, Kozo

  • Author_Institution
    University of Kentucky
  • fYear
    2001
  • fDate
    5-7 Dec. 2001
  • Firstpage
    314
  • Lastpage
    317
  • Abstract
    We present the successful fabrication, for the first time, of highly ordered C nanotube arrays on a silicon substrate using an anodized Al2O3 template by the flame synthesis method. This demonstrated the possibility for integration of carbon nanotube-based devices with Si integrated circuits
  • Keywords
    Aluminum; Carbon nanotubes; Fabrication; Fires; Mechanical engineering; Molecular electronics; Nanoscale devices; Organic materials; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2001 International
  • Conference_Location
    Washington, DC, USA
  • Print_ISBN
    0-7803-7432-0
  • Type

    conf

  • DOI
    10.1109/ISDRS.2001.984503
  • Filename
    984503