DocumentCode
2257337
Title
Fabrication of self-organized carbon nanotubes on si substrates using nano-template by flame synthesis technique
Author
Chen, Zhi ; Hu, Wenchong ; Yuan, Liming ; Saito, Kozo
Author_Institution
University of Kentucky
fYear
2001
fDate
5-7 Dec. 2001
Firstpage
314
Lastpage
317
Abstract
We present the successful fabrication, for the first time, of highly ordered C nanotube arrays on a silicon substrate using an anodized Al2O3 template by the flame synthesis method. This demonstrated the possibility for integration of carbon nanotube-based devices with Si integrated circuits
Keywords
Aluminum; Carbon nanotubes; Fabrication; Fires; Mechanical engineering; Molecular electronics; Nanoscale devices; Organic materials; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2001 International
Conference_Location
Washington, DC, USA
Print_ISBN
0-7803-7432-0
Type
conf
DOI
10.1109/ISDRS.2001.984503
Filename
984503
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