DocumentCode :
2257541
Title :
The fabrication and characterization of metal-oxide semiconductor field-effect transistors and gated diodes using (Ba0.5,Sr0.5)TiOsub 3/ gate dielectric
Author :
Liu, Yu-Rung ; Lee, Joseph Ya-min
Author_Institution :
Tsing-Hua University
fYear :
2002
fDate :
30 June-5 July 2002
Firstpage :
288
Lastpage :
291
Keywords :
Binary search trees; Dielectric constant; Dielectric measurements; FETs; Fabrication; MOS devices; MOSFETs; Semiconductor diodes; Sputtering; Strontium;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
Type :
conf
DOI :
10.1109/SIM.2002.1242773
Filename :
1242773
Link To Document :
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