Title :
The fabrication and characterization of metal-oxide semiconductor field-effect transistors and gated diodes using (Ba0.5,Sr0.5)TiOsub 3/ gate dielectric
Author :
Liu, Yu-Rung ; Lee, Joseph Ya-min
Author_Institution :
Tsing-Hua University
fDate :
30 June-5 July 2002
Keywords :
Binary search trees; Dielectric constant; Dielectric measurements; FETs; Fabrication; MOS devices; MOSFETs; Semiconductor diodes; Sputtering; Strontium;
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
DOI :
10.1109/SIM.2002.1242773