• DocumentCode
    2259231
  • Title

    Nonuniformity of commercial SOI wafers manifested by photoluminescence and lifetime mapping

  • Author

    Li, Z.Q. ; Tajima, M. ; Warashina, M. ; Sumie, S. ; Hashizume, H. ; Ogura, A.

  • Author_Institution
    Inst. of Space & Astronaut. Sci., Sagamihara, Japan
  • fYear
    2003
  • fDate
    29 Sept.-2 Oct. 2003
  • Firstpage
    135
  • Lastpage
    137
  • Abstract
    In this paper, nonuniformity of commercial SOI wafers manifested by photoluminescence and lifetime mapping were studied.
  • Keywords
    elemental semiconductors; photoluminescence; silicon-on-insulator; SOI wafers; Si; lifetime mapping; photoluminescence; Photoluminescence; Silicon on insulator technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, 2003. IEEE International
  • ISSN
    1078-621X
  • Print_ISBN
    0-7803-7815-6
  • Type

    conf

  • DOI
    10.1109/SOI.2003.1242927
  • Filename
    1242927
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2259231