Energy and ultra-pure water consumption saving by the room temperature cleaning

Energy-saving effect of a room temperature wet cleaning method using ozonated ultra-pure water is estimated in semiconductor manufacturing process. We can save 68% of electric energy and 33% of ultra-pure water consumption for each cleaning process in comparison with a conventional RCA cleaning. Total energy-saving effect using the room temperature cleaning method in front-end processes is 44% of electric and UPW generation energy. Electrical characteristics of gate oxide which is precleaned by using the room temperature wet cleaning method are equivalent for those by the conventional RCA cleaning.