Determination of the local electron density based on millimeter wave interferometry I: Theoretical analysis

The determination method of the local electron density is analyzed based on millimeter wave interferometry and the electron density measuring is experimented on a cylindrical plasmas setup. Analyses show that the local electron density is obtained with better precision by using the proposed method than that by adopting the traditional line-average method. Moreover, this method can also be exploited to determine the electron density and its spatial distribution accurately for other plasma sources.