Optical scattering analysis by dielectric and metallic spheres on oxidized silicon wafers

The optical scattering properties for dielectric and metallic spheres upon oxidized silicon wafers are focused on in this paper. Taking the advantage of the BV (Bobbert and Vileger) theorem, the scattering model between a wafer and the particle is established. The scattering process is analysed and the scattering coefficients are derived through expansion vector spherical harmonic function. The differential scattering cross section (DSCS) of the spheres upon the wafers is calculated and the correlation between scattering angle, size of the particle, SiO₂ layer thickness, the distance between substrate and spheres,and DSCS are discussed in detail.