Architecture and implementation of 3D field support in semiconductor wafer representation

This paper describes the design and implementation of a flexible architecture for representing general, mesh-based fields in one, two, and three dimensions. Representation of fields is one component of Semiconductor Wafer Representation (SWR) for TCAD Frameworks. Our architecture allows arbitrary field value types and a variety of element orders to be used based on a minimal description of the underlying mesh geometry. Implementation library components support efficient sharing of objects between clients while preserving full C++ type information. Client-level interfaces to external mesh generation and visualization are demonstrated