Title :
Field emitter-array development for microwave applications
Author :
Spindt ; Holland, C.E. ; Schwoebel, P.R. ; Brodie, Ivor
Author_Institution :
SRI Int., Menlo Park, CA, USA
Abstract :
Summary form only given. In order to make microfabricated field-emitters useful for microwave operation it is necessary to maximize the transconductance of the emitter array. The parameters that determine the transconductance are the emitter tip´s work function; the field-enhancement factor at the tip, /spl beta/ (E=/spl beta/V); and the packing density of the emitter array. The work function depends on the tip material and the condition of the tip´s surface resulting from processing and operating environment. Control of these parameters can be rather limited in practical applications. It is shown that the most direct way to increase the transconductance is by increasing the packing density of the emitter array. With emerging lithography techniques it is possible to increase the packing density by about two orders of magnitude over what was available at the start of the microwave development effort. Updated details of how these improvements have been implemented and their impact on cathode performance are presented.
Keywords :
arrays; cathodes; microwave tubes; photolithography; vacuum microelectronics; work function; cathode performance; emitter array; field emitter-array; field-enhancement factor; flat-panel display; lithography techniques; microfabricated field-emission arrays; microfabricated field-emitters; microwave applications; microwave operation; packing density; transconductance; work function; Apertures; Cathodes; Fabrication; Field emitter arrays; Flat panel displays; Lithography; Microwave antenna arrays; Microwave technology; Shape; Transconductance;
Conference_Titel :
Plasma Science, 1995. IEEE Conference Record - Abstracts., 1995 IEEE International Conference on
Conference_Location :
Madison, WI, USA
Print_ISBN :
0-7803-2669-5
DOI :
10.1109/PLASMA.1995.531555