DocumentCode :
2270034
Title :
DCS-1: a fuzzy logic expert system for automatic defect classification of semiconductor wafer defects
Author :
Luria, Marc ; Moran, Maty ; Yaffe, Dan ; Kawski, Jim
Author_Institution :
Galai Lab., Migdal Haemek, Israel
fYear :
1994
fDate :
26-29 Jun 1994
Firstpage :
2100
Abstract :
DCS-1, a defect classification system for classifying defects on a semiconductor wafers using a builtin fuzzy logic expert system is described. DCS-1 is advantageous over manual classification because it is both objective and fast. Defect classes are defined using DDL (Defect Description Language), a language of fuzzy predicates which was developed for this application. The paper describes a unique approach to fuzzy logic and image processing where fuzzy features are computed using traditional image processing techniques and classifications are decided using fuzzy logic rules
Keywords :
automatic optical inspection; computer vision; diagnostic expert systems; fuzzy logic; image recognition; semiconductor device manufacture; DCS-1; Defect Description Language; automatic defect classification; defect classification system; fuzzy logic expert system; fuzzy predicates; image processing; semiconductor wafer defects; Expert systems; Fuzzy logic; Humans; Image processing; Laboratories; Manufacturing automation; Manufacturing processes; Reliability engineering; Robustness; Software tools;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Fuzzy Systems, 1994. IEEE World Congress on Computational Intelligence., Proceedings of the Third IEEE Conference on
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-1896-X
Type :
conf
DOI :
10.1109/FUZZY.1994.343541
Filename :
343541
Link To Document :
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