Materials analysis of degraded vertical cavity surface emitting lasers

Summary from only given. Using TEM and novel focused ion beam (FIB) sectioning techniques we have investigated the mechanisms that are responsible for VCSEL degradation and failure. The main cause of failure is the generation of complex dislocation dipole and loop arrays likely by non-radiative recombination enhanced mechanisms. Dislocations punched out due to oxide-induced strain or dislocations with origins in the substrate or surface appear to act as nucleation sites for these complex arrays.