Particle scattering on the nanoscale surface roughness in a statistical model based on AFM measurements

By employment previously developed statistical model of the surface roughness in nanoscale based on AFM measurements the analitycal formulars for molecular scattering were obtained which provide also coefficients of molecular energy and impuls exchange with boundary walls of nanoscale devices correcting its operating performances. The results can be employed as well to simulate boundary conditions for calculating molecular flows by numerical Monte Carlo methods at nanoscale and to estimate the properties of new materials for usefulness as protective surface coatings in the nanosystems containing gas flows.