Title :
Energy dispersion of sputtered particles
Author :
Moos, Evgeny N. ; Savushkin, Oleg V.
Author_Institution :
Ryazan State Univ. named for S. Esenin, Ryazan, Russia
fDate :
June 30 2014-July 4 2014
Abstract :
The exchange energy process in system “surface - nuclear particle” in model of pair interactions is considered. The possibility of such description is shown from the first order of the perturbation theory. The sputtered atom particle energy dispersion depends on a ratio of the incident and surface masses, the energy of the probe particles, and an exchange field distance.
Keywords :
perturbation theory; sputtering; atom particle energy dispersion; energy dispersion; exchange energy process; exchange field distance; pair interaction model; perturbation theory; sputtered particles; surface mass; surface nuclear particle system; Dispersion; Educational institutions; Electronic mail; Probes; Surface treatment; Surface waves; Wave functions;
Conference_Titel :
Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-5770-5
DOI :
10.1109/IVESC.2014.6892036
