• DocumentCode
    227514
  • Title

    Effect of titanium content on the impedance characteristics of high-Κ TbTxOy electrolyte-insulator-semiconductor pH sensors

  • Author

    Chih-Wei Wang ; Tung-Ming Pan ; Fu-Chien Chiu ; Lifeng Chi

  • Author_Institution
    Chang Gung Univ., Taoyuan, Taiwan
  • fYear
    2014
  • fDate
    June 30 2014-July 4 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The effect of titanium content on the impedance characteristics of TbTixOy EIS sensors was investigated by means of C-V method. The bulk resistance increases with increasing pH value of a solution. Finally, the TbTixOy EIS device measured at the inversion regime exhibited higher impedance as compared to the accumulation and depletion regimes.
  • Keywords
    chemical sensors; electric impedance measurement; electric resistance measurement; electrolytes; pH measurement; semiconductor-insulator boundaries; terbium compounds; C-V method; EIS device measurement; EIS sensor; TbTixOy; bulk resistance; depletion regime; high-κ electrolyte-insulator-semiconductor pH sensor; impedance characteristics; inversion regime; titanium content effect; Impedance; Impedance measurement; Resistance; Semiconductor device measurement; Sensor phenomena and characterization; Titanium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
  • Conference_Location
    St. Petersburg
  • Print_ISBN
    978-1-4799-5770-5
  • Type

    conf

  • DOI
    10.1109/IVESC.2014.6892099
  • Filename
    6892099
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=227514