Title :
Rules of automation for 200mm semiconductor manufacturing environment
Author :
Heinrich, Harald ; Deutschländer, Arthur
Author_Institution :
Factory Lo.gistics & Autom., Infineon Technol. Dresden GmbH, Dresden, Germany
Abstract :
This article focuses on Infineon´s consequent way to retain their European facilities by designing and building a high profitable eight inch manufacturing environment. The challenges for automation in such an environment are discussed and practical experiences are presented. Based on more than 7 years of automation experiences, we developed summarized rules of automation. We will show the advantages and benefits of our automation strategy for high volume/high mix eight inch facilities.
Keywords :
factory automation; production facilities; semiconductor device manufacture; European facilities; Infineon; automation rule; automation strategy; semiconductor manufacturing environment; size 200 mm; size 8 inch; Automation; Manufacturing; Materials; Production; Robots; Software; Standards; automated lot handling; automation strategy; layout concepts; manufacturing performance; reduction of cycle time and variability; robotics; standardization of processes;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI
Conference_Location :
Saratoga Springs, NY
Print_ISBN :
978-1-4673-0350-7
DOI :
10.1109/ASMC.2012.6212867