Ferroelectric Properties of Mn-substituted BiFeO3 Thin Film on Ir Electrodes

In this study, ferroelectric properties and fatigue endurance of 5% Mn-substituted BiFeO₃ (BFO) films deposited on Iridium (Ir) and Platinum (Pt) electrodes were discussed. 5% Mn-substituted BFO thin films were formed on Ir(Pt)/Ti/SiO₂/Si(100) substrates by chemical solution deposition (CSD). XRD patterns proved that BFO films on both Ir and Pt electrodes have distorted rhombohedral R3c structure. Leakage current in BFO films on Ir electrode increased because of the lower Schottky barrier height than Pt. Remanent polarization (Pr) and coercive electric field in BFO films on Ir electrode were 82 muC/cm² and 0.4 MV/cm respectively at an applied electric field of 2.2MV/cm and a measurement frequency of 10 kHz. In the fatigue endurance measurement in a BFO film on Ir electrode degradation of Pr (55 muC/cm²) was negligible up to 4.7times10⁶ polarization reversal cycles.