DocumentCode :
2278781
Title :
Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application
Author :
Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.
Author_Institution :
aixACCT Syst. GmbH, Aachen
fYear :
2007
fDate :
27-31 May 2007
Firstpage :
702
Lastpage :
702
Abstract :
The electrical and electromechanical properties of piezoelectric thin films were measured using different measurement procedures including a new method which combines the measurement of both the effective longitudinal and transverse piezoelectric coefficients on the same sample under precisely defined homogeneous mechanical strain utilizing a 4-point bending setup. Stress and corresponding strain distributions in the film were verified by finite element simulations.
Keywords :
micromechanical devices; permittivity; piezoelectric materials; piezoelectric thin films; piezoelectricity; stress analysis; 4-point bending setup; MEMS; effective longitudinal piezoelectric coefficient; effective transverse piezoelectric coefficient; electrical properties; electromechanical properties; finite element simulations; homogeneous mechanical strain; microelectromechanical systems; piezoelectric thin films; strain distribution; stress distribution; Control systems; Electromechanical sensors; Microelectromechanical systems; Micromechanical devices; Piezoelectric films; Piezoelectric materials; Sensor arrays; Sensor phenomena and characterization; Strain measurement; Stress measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
ISSN :
1099-4734
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
Type :
conf
DOI :
10.1109/ISAF.2007.4393376
Filename :
4393376
Link To Document :
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