A simple impedance correction for on-wafer TAN calibration techniques

Author

Bahouche, M. ; Allal, D. ; Bergeault, E.

Author_Institution

Lab. Nat. de Metrol. et d´´Essais, Trappes

fYear

2008

fDate

8-13 June 2008

Firstpage

418

Lastpage

419

Abstract

A general method initially developed for the estimation of the S-parameters measurement errors caused by non-ideal calibration standards, is applied for the correction of the reference impedance of 7- term through-attenuator-network (TAN) calibration procedures such as thru-attenuator reflect (TAR). Deviations from ideal calibration elements are measured on-wafer using the multiline TRL method and can be taken into account without the need for a precise determination of the reference impedance (lumped elements).

Keywords

S-parameters; attenuators; calibration; electric impedance measurement; measurement errors; measurement standards; S-parameters measurement errors; lumped elements; nonideal calibration standards; reference impedance; reference impedance correction; through-attenuator-network calibration; thru-attenuator reflect; Attenuators; Calibration; Coplanar waveguides; Impedance measurement; Measurement errors; Measurement standards; Performance evaluation; Reflection; Scattering parameters; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements Digest, 2008. CPEM 2008. Conference on

Conference_Location

Broomfield, CO

Print_ISBN

978-1-4244-2399-6

Electronic_ISBN

978-1-4244-2400-9

Type

conf

DOI

10.1109/CPEM.2008.4574831

Filename

4574831