• DocumentCode
    2279422
  • Title

    Optical Characteristics of a PZT Waveguide Fabricated Using Aerosol Deposition for Optical Modulators on LSI Chips

  • Author

    Shimizu, T. ; Nakada, M. ; Tsuda, H. ; Akedo, J. ; Nishi, K. ; Ohashi, K.

  • Author_Institution
    MIRAI-Selete, Ibaraki
  • fYear
    2007
  • fDate
    27-31 May 2007
  • Firstpage
    831
  • Lastpage
    833
  • Abstract
    We developed a lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), optical waveguide fabricated using aerosol deposition (AD). The device´s optical transmission loss of about 4 dB/mm is comparable with that of AD film. The PZT optical waveguide can meet the requirements of optical modulators for low optical loss.
  • Keywords
    aerosols; electro-optical modulation; integrated optics; large scale integration; lead compounds; optical films; optical losses; optical waveguides; piezoelectric devices; LSI chips; PZT; PZT waveguide; aerosol deposition; electro-optic modulators; integrated circuits; optical characteristics; optical modulators; optical transmission loss; Aerosols; Large scale integration; Lead; Optical devices; Optical films; Optical losses; Optical modulation; Optical waveguides; Propagation losses; Titanium compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
  • Conference_Location
    Nara
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-1334-8
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2007.4393418
  • Filename
    4393418
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2279422