Simulation od capacitively coupled atmospheric pressure water vapor plasma

Summary form only given. The results of a spatiotemporal simulation of a capacitively coupled water vapor plasma is reported. The simulated discharge consists of two electrodes separated by gap distance of 1 mm operating at 13.56~ MHz with 19 species and 69 dominant reaction channels. The conditions under which the plasma can be created is explored and space and time profiles of the electron densities are presented. The model finds that in the present configuration a water vapor cannot be created at pressures of greater than 0.1 atmosphere. The model has also be used to demonstrate the role of rotational and vibrational excitation of water molecules in suppressing electrical breakdown.