Title :
Lead-free Piezoelectric Thin Films for Bio-medical Applications
Author :
Kim, Seung-Hyun ; Koo, C.Y. ; Cheon, J.-H. ; Yeom, J.-H. ; Woo, H.-J. ; Ha, J.
Author_Institution :
INOSTEK Inc., Ansan
Abstract :
A systematic investigation of dielectric and piezoelectric properties of lead-free NKN films prepared by chemical solution deposition method is performed for Na/K = 50/50 composition. Among various lead-free materials, it is clarified that NKN films can be strong candidates for replacing PZT based piezoelectric thin films due to their reasonably good piezoelectric properties even if overall properties are somewhat worse than those of PZT based piezoelectrics. These results indicate that NKN films might be a promising lead-free piezoelectric system for a wide range of bio-compatible MEMS applications.
Keywords :
bioMEMS; liquid phase deposition; permittivity; piezoelectric thin films; potassium compounds; sodium compounds; Na0.5K0.5NbO3; biocompatible MEMS; chemical solution deposition method; dielectric constant; dielectric properties; lead-free NKN films; lead-free piezoelectric thin films; piezoelectric properties; piezoelectric system; Chemicals; Dielectric substrates; Dielectric thin films; Environmentally friendly manufacturing techniques; Ferroelectric films; Micromechanical devices; Piezoelectric films; Scanning electron microscopy; Semiconductor films; X-ray scattering;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393428
