Title :
1 chip integrated software calibrated CMOS pressure sensor with MCU, A/D convertor, D/A convertor, digital communication port, signal conditioning circuit and temperature sensor
Author :
Yoshii, Yoshiharu ; Nakajo, Akira ; Abe, Hiroya ; Nimomiya, K. ; Miyashita, Hitoshi ; Sakurai, Naoko ; Kosuge, Masahiro ; Hao, Simon
Author_Institution :
Semicond. Products Div., Nippon Motorola Ltd., Sendai, Japan
Abstract :
This paper reports the newly developed 1 chip integrated CMOS pressure sensor, its highly manufacturable fabrication process using SOI substrate, its output characteristics calibrated and compensated by software on MCU with excellent absolute accuracy over wide temperature range, and the calibration system to perform calibration process
Keywords :
CMOS integrated circuits; calibration; computerised instrumentation; microsensors; piezoresistive devices; pressure sensors; silicon-on-insulator; A/D convertor; CMOS pressure sensor; D/A convertor; MCU; SOI substrate; Si; Si-SiN; accuracy; calibration; compensation; die fabrication; digital communication port; integrated software; output characteristics; signal conditioning circuit; temperature sensor; CMOS process; Calibration; Fabrication; Manufacturing processes; Pulp manufacturing; Sensor phenomena and characterization; Sensor systems; Software performance; Temperature distribution; Temperature sensors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635746
