Analyzing the effect of metals on the dynamic performance of RF MEMS Switch

RF MEMS (Radiofrequency Microelectromechanical systems) is the area of MEMS which deals with study and development of RF components for communication applications. In telecommunication domain, one of the critical parameter is bandwidth that can be controlled by device parameters namely threshold voltage and resonant frequency. Although these parameters have marked relevance for its given functions in telecom devices, it comes with greater challenges related to production and costing of these devices. Therefore to effectively reduce the system costs without affecting the functioning of the device, size miniaturization plays a pivotal role. Importantly this idea can be implemented using simple structure and continuous development in electromechanical systems that yet remain elusive. This study proposes the Simple RF MEMS Switch with two different Models comprising of Aluminum and Gold metals to obtain higher dynamic stiffness and Low threshold voltage with best Frequency Response. The Results obtained showed that Aluminum has best Inherent frequencies with desired low threshold voltage up to 2.02 V.