Interferometric determinations of the volume of silicon spheres with a direct optical frequency tuning system

Author

Kuramoto, N. ; Fujii, K.

Author_Institution

Nat. Inst. of Adv. Ind. Sci. & Technol., Nat. Metrol. Inst. of Japan, Tsukuba, Japan

fYear

2002

fDate

16-21 June 2002

Firstpage

294

Lastpage

295

Abstract

For accurate volume measurements of 1-kg silicon spheres, a new interferometer with a direct optical frequency tuning system using a phase-lock loop offset locking has been developed. Accurate frequency changes in a laser produced by the frequency tuning system have been used for diameter measurements of the spheres by phase-shifting interferometry.

Keywords

Fabry-Perot interferometers; diameter measurement; elemental semiconductors; laser tuning; light interferometry; measurement by laser beam; silicon; volume measurement; 1 kg; Avogadro constant; Fabry-Perot etalon; Si; Si spheres; diameter measurements; direct optical frequency tuning system; external cavity diode laser; interferometer; interferometric determinations; laser frequency tuning; phase-lock loop offset locking; phase-shifting interferometry; volume measurements; Diode lasers; Frequency measurement; Laser beams; Laser tuning; Metrology; Optical interferometry; Optical tuning; Phase measurement; Phase shifting interferometry; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements, 2002. Conference Digest 2002 Conference on

Conference_Location

Ottawa, Ontario, Canada

Print_ISBN

0-7803-7242-5

Type

conf

DOI

10.1109/CPEM.2002.1034837

Filename

1034837