Title :
Improvement of morphology, structure, and optical properties of GaAs nanowires grown on Si substrates
Author :
Kang, Jung-Hyun ; Gao, Qiang ; Joyce, Hannah J. ; Tan, Hark Hoe ; Jagadish, Chennupati ; Kim, Yong ; Guo, Yanan ; Xu, Hongyi ; Zou, Jin ; Fickenscher, Melodie A. ; Smith, Leigh M. ; Jackson, Howard E. ; Yarrison-Rice, Jan M.
Author_Institution :
Dept. of Electron. Mater. Eng., Australian Nat. Univ., Canberra, ACT, Australia
Abstract :
We investigate vertical and defect-free growth of GaAs nanowires on Si (111) substrates via a vapor-liquid-solid (VLS) growth mechanism with Au catalysts by metal-organic chemical vapor deposition (MOCVD). By using annealed thin GaAs buffer layers on the surface of Si substrates, most nanowires are grown on the substrates straight, following (111) direction; by using two temperature growth, the nanowires were grown free from structural defects, such as twin defects and stacking faults. Systematic experiments about buffer layers indicate that V/III ratio of precursor and growth temperature can affect the morphology and quality of the buffer layers. Especially, hetero-structural buffer layers grown with different V/III ratios and temperatures and in-situ post-annealing step are very helpful to grow well arranged, vertical GaAs nanowires on Si substrates. The initial nanowires having some structural defects can be defect-free by two-temperature growth mode with improved optical property, which shows us positive possibility for optoelectronic device application.
Keywords :
III-V semiconductors; annealing; buffer layers; chemical vapour deposition; gallium arsenide; nanofabrication; nanowires; semiconductor growth; semiconductor quantum wires; stacking faults; GaAs; MOCVD; Si; Si (111) substrates; V-III ratios; annealed thin buffer layers; defect-free growth; growth temperature; in-situ post-annealing step; metal-organic chemical vapor deposition; morphology; nanowires; optical properties; stacking faults; structure properties; twin defects; two-temperature growth mode; vapor-liquid-solid growth; vertical growth; Defect-free; Epitaxial Growth; GaAs; MOCVD; Nanowire; Si substrate;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-7033-4
Electronic_ISBN :
1944-9399
DOI :
10.1109/NANO.2010.5697783