DocumentCode
2285772
Title
Reducing stick-slip motion in one-dimensional nano manipulation by real-time feedback control
Author
Zhang, Jing ; Miao, Lei ; Wu, Re-Bing ; Xi, Ning ; Li, Chun-Wen ; Wang, Yue-chao ; Tarn, Tzyh-Jong
Author_Institution
Dept. of Autom., Tsinghua Univ., Beijing, China
fYear
2010
fDate
17-20 Aug. 2010
Firstpage
826
Lastpage
830
Abstract
When a micro cantilever with a nanoscale tip is manipulated on a substrate with atomic roughness, e.g., pushing an atomic-scale sample or etching the surface of the substrate to draw desired patterns, the periodical lateral frictional forces with stochastic fluctuations will induce stick-slip motion of the cantilever tip, which may greatly influence the precision of the nano manipulation. To reduce such a stick-slip motion, we propose a feedback control strategy based on the position estimation of the cantilever tip to compensate the periodical frictional force. Numerical simulations show that the motion of the cantilever tip under feedback control can track the desired trajectory asymptotically. Our proposal can also be extended to the case when the cantilever tip moves over a Gaussian-shape defection on the substrate and when the stochastic fluctuations in the lateral force are with non-zero correlation time.
Keywords
cantilevers; feedback; micromanipulators; nanotechnology; real-time systems; substrates; Gaussian shape defection; asymptotic trajectory; atomic roughness; cantilever tip; microcantilever; nanoscale tip; nonzero correlation time; one-dimensional nanomanipulation; periodical lateral frictional forces; position estimation; real-time feedback control; stick-slip motion; stochastic fluctuations; substrate;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
Conference_Location
Seoul
ISSN
1944-9399
Print_ISBN
978-1-4244-7033-4
Electronic_ISBN
1944-9399
Type
conf
DOI
10.1109/NANO.2010.5697831
Filename
5697831
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