Surface identification using angle resolved light scatter measurements

Author

Rinder, T. ; Rothe, H.

Author_Institution

Univ. of the Federal Armed Forces, Hamburg, Germany

Volume

6

fYear

2000

fDate

2000

Firstpage

67

Abstract

Observing the light scattered back from an illuminated surface is a fast and non-contact method to characterize surface microtopography. It is very largely applied in semiconductor industry by using goniometers. This paper deals with surface microtopography identification based on angle resolved light scatter measurements using neural pattern recognition methods and a very fast calibrated scatter sensor for the purpose of automated surface inspection in precision engineering

Keywords

automatic optical inspection; goniometers; neural nets; pattern classification; pattern recognition; angle resolved light scatter; automated surface inspection; neural pattern recognition; non-contact method; precision engineering; surface identification; surface microtopography; surface microtopography identification; Force measurement; Light scattering; Optical polarization; Optical scattering; Optical sensors; Optical surface waves; Rayleigh scattering; Sensor arrays; Surface topography; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Neural Networks, 2000. IJCNN 2000, Proceedings of the IEEE-INNS-ENNS International Joint Conference on

Conference_Location

Como

ISSN

1098-7576

Print_ISBN

0-7695-0619-4

Type

conf

DOI

10.1109/IJCNN.2000.859374

Filename

859374