• DocumentCode
    2286002
  • Title

    Organic/inorganic hybrid gate dielectric for high-performance and low-power organic thin-film transistors

  • Author

    Shin, Woo Cheol ; Moon, Hanul ; Yoo, Seunghyup ; Cho, Byung Jin

  • Author_Institution
    Dept. of Electr. Eng., KAIST, Daejeon, South Korea
  • fYear
    2010
  • fDate
    17-20 Aug. 2010
  • Firstpage
    936
  • Lastpage
    939
  • Abstract
    High-performance and low-voltage OTFTs have been demonstrated by employing a multilayer dielectric structure where ultrathin PVP (8 nm) is coated on top of high-κ HfLaO (20 nm). The multilayer dielectric exhibited a low leakage current density of 4.6×10-8 A/cm2 at -3 V while maintaining a high capacitance density of 340 nF/cm2. The device with the multilayer dielectric showed superior performance as compared to that of the device with single HfLaO (20 nm) dielectric such as a low threshold voltage (VT) of 0.5 V, a low subthreshold slope (SS) of 0.09 V/decade, a high on-off current ratio (Ion/Ioff) of 5×105 and a saturation mobility (μSAT) of 0.34 cm2V-1s-1 along with a low operating voltage of -2 V. Due to the enhanced μSAT with the high gate capacitance of the device with multilayer dielectric, we also achieved a high μSATCox of 114 nF/Vs, thereby leading to superior drain current drivability.
  • Keywords
    carrier mobility; current density; low-power electronics; organic semiconductors; thin film transistors; high performance organic thin-film transistors; low leakage current density; low power organic thin-film transistors; multilayer dielectric structure; on-off current ratio; organic/inorganic hybrid gate dielectric; saturation mobility; superior drain current drivability; OTFT; high-k; hybrid dielectric; low-power; mobility;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
  • Conference_Location
    Seoul
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4244-7033-4
  • Electronic_ISBN
    1944-9399
  • Type

    conf

  • DOI
    10.1109/NANO.2010.5697845
  • Filename
    5697845