• DocumentCode
    2303199
  • Title

    Low-loss TiO2 planar waveguides for nanophotonic applications

  • Author

    Bradley, J.D.B. ; Evans, C.C. ; Parsy, F. ; Phillips, K.C. ; Senaratne, R. ; Marti, E. ; Mazur, E.

  • Author_Institution
    Sch. of Eng. & Appl. Sci., Harvard Univ., Cambridge, MA, USA
  • fYear
    2010
  • fDate
    7-11 Nov. 2010
  • Firstpage
    313
  • Lastpage
    314
  • Abstract
    We deposit TiO2 planar waveguides on oxidized silicon substrates by reactive sputtering. The films exhibit Raman spectra consistent with an amorphous or anatase phase and have losses as low as 0.4 dB/cm at 826 nm.
  • Keywords
    Raman spectra; nanophotonics; optical losses; optical planar waveguides; sputter deposition; thin films; titanium compounds; Raman spectra; TiO2; amorphous phase; anatase phase; low-loss planar waveguides; nanophotonic applications; reactive sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE Photonics Society, 2010 23rd Annual Meeting of the
  • Conference_Location
    Denver, CO
  • ISSN
    -
  • Print_ISBN
    978-1-4244-5368-9
  • Electronic_ISBN
    -
  • Type

    conf

  • DOI
    10.1109/PHOTONICS.2010.5698885
  • Filename
    5698885
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2303199