High Resolved Spectra of Pulse High Current Capillary Discharge Plasma

We have built two experimental apparatuses CAPEX and CAPEX-U. On both these devices we have observed a very strong amplification of Ne-like argon line at 46.9 nm. However, these devices are not only lasing at 46.9 nm, but they also serve for testing a possibility of amplification at shorter wavelengths (below 20 nm) that have more practical applications (e.g. as a potential source for XUV lithography). CAPEX device is a smaller and less powerful than CAPEX-U facility. On the other hand, this apparatus has higher capillary current rise-rate, which is more desirable for reaching amplification below 20 nm. At present capillary discharge experiments with nitrogen-filled capillary are in progress. High resolved spectra are obtained with the help of McPherson spectrometer. We report not only on the successful operation of the compact "table-top" discharge driven 46.9 nm laser (argon-filled capillary) but also on our chances to achieve amplification at 13.4 nm (nitrogen-filled capillary) based mainly on results of axial soft X-ray spectroscopic measurements.