Title :
Studies On Transport Of Sputtered Atoms in Plasma Sputter-Deposition Systems
Author :
Moreno-Marin, J.C. ; Athavale, S. ; Gras-Marti, A. ; Auciello, O.
Author_Institution :
N.C. State Univ.
Keywords :
Analytical models; Atmospheric modeling; Atomic layer deposition; Plasma accelerators; Plasma materials processing; Plasma measurements; Plasma sheaths; Plasma simulation; Plasma transport processes; Radio frequency;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695546
