Title :
High-efficiency matching network for RF-driven ion sources
Author :
Staples, J. ; Schenkel, T.
Author_Institution :
LBNL, Berkeley, CA, USA
Abstract :
RF-driven ion sources used at LBNL connect a 2 MHz transmitter to an antenna in the plasma generator through an impedance matching network. Previous networks are of low efficiency and require a high-power RF transmitter to excite the plasma. A new network topology provides significantly higher efficiency and matches very low-inductance antennas, with a geometrically preferred form factor. A dual-frequency network option allows a low-level 13.56 MHz transmitter to pre-excite the plasma, eliminating the need for other ignition devices such as a filament or laser, simplifying source construction. Experimental results will be presented
Keywords :
accelerator RF systems; antennas in plasma; impedance matching; ion sources; network topology; plasma production; 13.56 MHz; 2 MHz; LBNL; RF-driven ion sources; dual-frequency network; high-efficiency matching network; ignition devices; impedance matching network; inductance antennas; network topology; plasma generator; Ignition; Impedance matching; Ion sources; Laser excitation; Network topology; Plasma devices; Plasma sources; Radio frequency; Transmitters; Transmitting antennas;
Conference_Titel :
Particle Accelerator Conference, 2001. PAC 2001. Proceedings of the 2001
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-7191-7
DOI :
10.1109/PAC.2001.987292
