DocumentCode
230460
Title
NbO2 -based low power and cost effective 1S1R switching for high density cross point ReRAM Application
Author
Wan Gee Kim ; Hyun Min Lee ; Beom Yong Kim ; Kyoo Ho Jung ; Tae Geun Seong ; Seonghyun Kim ; Ha Chang Jung ; Hyo June Kim ; Jong Hee Yoo ; Hyung Dong Lee ; Soo Gil Kim ; Suock Chung ; Kee Jeung Lee ; Jung Hoon Lee ; Hyeong Soo Kim ; Seok Hee Lee ; Jianhua
Author_Institution
R&D Div., SK Hynix Inc., Icheon, South Korea
fYear
2014
fDate
9-12 June 2014
Firstpage
1
Lastpage
2
Abstract
In this paper, 5Xnm cross point cell array for the low power ReRAM operation was developed with 1S1R cell structure. Through the optimization of both TiOx/TaOx based-1R and NbO2 based-1S stacks with TiN based-electrode, the world´s first and best bipolar switching characteristics with the lowest operation current (20~50uA) and sneak current (~1uA) level were acquired.
Keywords
low-power electronics; random-access storage; 1S1R cell structure; bipolar switching characteristics; cross point cell array; high density cross point ReRAM application; low power ReRAM operation; Arrays; Electrodes; Materials; Resistance; Resistors; Switches; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology (VLSI-Technology): Digest of Technical Papers, 2014 Symposium on
Conference_Location
Honolulu, HI
ISSN
0743-1562
Print_ISBN
978-1-4799-3331-0
Type
conf
DOI
10.1109/VLSIT.2014.6894405
Filename
6894405
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