Title :
Categorizing light output degradation failures in LEDs using the relationship between defect revealing mechanisms responsible for electroluminescence (EL), cathodoluminescence (CL), EBIC, and reverse bias photoemission (RP)
Author :
Mann, Richard S. ; McElfresh, David K.
Author_Institution :
Optoelectron. Div., Hewlett-Packard Co., San Jose, CA, USA
Abstract :
This paper describes a methodology for the analysis of dark spot defects (DSDs) that accompany optical output intensity degradation (-/spl Delta/I/sub v/) in light emitting diodes (LEDs). There are many mechanisms that result in premature -/spl Delta/I/sub v/ failures. A methodology which has evolved from many years of failure analysis experience with LEDs allows -/spl Delta/I/sub v/ failures to first be separated into uniform or non-uniform degradation categories. Those with DSD symptoms can be further characterized utilizing the correspondence, or lack of it, between defect locations found by electroluminescence microscopy (EL), reverse bias photoemission microscopy (RP), electron beam induced current contrast imaging (EBIC), and cathodoluminescence imaging(CL). This approach has had good success in separating assembly and handling failures from faulty wafer fabrication and epitaxial growth failures. Using the location revealed by these techniques as a guide for cross section location, high resolution secondary electron imaging (SEI) or microchemical analysis, we have been successful in revealing the unique attributes at the defect location.
Keywords :
EBIC; cathodoluminescence; electroluminescence; failure analysis; light emitting diodes; photoemission; secondary electron emission; semiconductor device reliability; EBIC; LEDs; assembly failures; cathodoluminescence; cross section location; dark spot defects; defect revealing mechanisms; electroluminescence; epitaxial growth failures; failure analysis; faulty wafer fabrication; handling failures; high resolution secondary electron imaging; light emitting diodes; light output degradation failures; microchemical analysis; nonuniform degradation; optical output intensity degradation; reverse bias photoemission; uniform degradation; Degradation; Electroluminescence; Electron beams; Electron microscopy; Failure analysis; High-resolution imaging; Light emitting diodes; Optical imaging; Photoelectricity; Stimulated emission;
Conference_Titel :
Reliability Physics Symposium, 1995. 33rd Annual Proceedings., IEEE International
Conference_Location :
Las Vegas, NV
Print_ISBN :
0-7803-2031-X
DOI :
10.1109/RELPHY.1995.513672