Highly linear capacitive pressure sensors with optimized electrode shapes

Author

Benzel, H.W. ; Kallfass, T. ; Lueder, E.

Author_Institution

Inst. for Network & Syst. Theory, Stuttgart Univ., Germany

fYear

1993

fDate

5-8 Dec. 1993

Firstpage

203

Lastpage

206

Abstract

A method for linearizing a capacitive pressure sensor with a circular diaphragm by optimization of the electrode shapes is described. First a sensor with pressure dependent reference capacitor is used to linearize the ratio of the reference and the sensing capacitor. To improve the linearity furthermore a third pressure dependent capacitor in the sensor is added. An integrated CMOS amplifier using switched capacitor techniques is used to readout the sensor capacitors. Finally the measurement results of a thick-film sensor with a hybrid readout circuit are given.<>

Keywords

CMOS integrated circuits; electrodes; linear integrated circuits; linearisation techniques; pressure sensors; signal processing equipment; thick film devices; capacitive pressure sensors; circular diaphragm; hybrid readout circuit; integrated CMOS amplifier; linearisation; optimized electrode shapes; pressure dependent capacitor; switched capacitor techniques; thick-film sensor; Capacitive sensors; Capacitors; Electrodes; Integrated circuit measurements; Linearity; Optimization methods; Sensor phenomena and characterization; Shape; Thick film sensors; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1993. IEDM '93. Technical Digest., International

Conference_Location

Washington, DC, USA

ISSN

0163-1918

Print_ISBN

0-7803-1450-6

Type

conf

DOI

10.1109/IEDM.1993.347241

Filename

347241