Title :
Silicon pressure transducers with frequency output on base strain sensitive unijunction transistors
Author :
Babichev, G.G. ; Kozlovskiy, S.I. ; Romanov, V.A. ; Sharan, N.N.
Author_Institution :
Inst. of Semicond. Phys., Acad. of Sci., Kiev, Ukraine
Abstract :
Silicon pressure transducers with frequency output are simulated and designed The sensitive elements of the transducers are strain sensitive unijunction transistors. Two types of strain sensitive unijunction transistors are investigated: simple unijunction transistor (or double-base diode) and unijunction transistor with controlling p-n-junction. The transistors are classed as stress-sensitive semiconductor lateral bipolar devices with an S-type input (emitter) I-V characteristics. Using Fourier method and Green´s function formalism the optimal layout of the devices and their basic parameters are determined. The devices can serve as a basis for designing pressure sensors with physically integrated function of mechanical stress-to-signal frequency conversion at the output.
Keywords :
Green´s function methods; characteristics measurement; elemental semiconductors; pressure transducers; semiconductor device measurement; silicon; unijunction transistors; Fourier method; Green´s function formalism; I-V characteristics; S-type input; Si; base strain sensitive unijunction transistors; controlling p-n-junction; double-base diode; frequency output; mechanical stress-to-signal frequency conversion; pressure transducers; stress-sensitive semiconductor lateral bipolar devices; Anisotropic magnetoresistance; Capacitive sensors; Charge carrier processes; Frequency; Magnetic anisotropy; Perpendicular magnetic anisotropy; Physics; Semiconductor diodes; Silicon; Transducers;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037247