Title :
Motion dynamics sensing scheme for MEMS micro-motor
Author :
McCaslin, Martin J. ; Sarto, Marco Del ; Kozubol, Eric J.
Author_Institution :
Read-Rite Corp., Fremont, CA, USA
Abstract :
A direct sense method for MEMS micro-motors is described which enables design, reliability and inspection engineers to quickly evaluate device functionality. Capacitive coupling of the suspended mass/inertia is inherently superimposed into the system dynamic. With careful acquisition of the electrically coupled portion, extracting the desired mechanical transfer function is both possible and direct.
Keywords :
capacitive sensors; characteristics measurement; electrostatic motors; semiconductor device measurement; MEMS micromotor; capacitive coupling; device functionality; direct sense method; electrically coupled portion; mechanical transfer function; motion dynamics sensing scheme; system dynamic; Couplings; Fingers; Frequency; Micromechanical devices; Micromotors; Optical filters; Optical modulation; Silicon; Stators; Testing;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037257
