Title :
ARROW-based optical accelerometers
Author :
Llobera, A. ; Plaza, J.A. ; Salinas, I. ; Berganzo, J. ; Garcia, J. ; Esteve, J. ; Dominguez, C.
Author_Institution :
Centro Nacional de Microelectron., Univ. Autonoma de Barcelona, Spain
Abstract :
Design, fabrication and characterization of silicon-based stress-free self-aligned quad beam accelerometer is presented. Standard total internal reflection waveguides have been replaced by ARROW structures, enhancing the sensitivity to >4dB/g at the wavelength visible range (633nm) Moreover, as the waveguide core has approximately the same size as the input fiber optic, insertion losses have been reduced to 2.5dB. Attenuation in ARROW waveguides is 0.3dB/cm.
Keywords :
accelerometers; arrayed waveguide gratings; elemental semiconductors; micro-optics; microsensors; optical losses; optical sensors; silicon; 2.5 dB; 633 nm; ARROW waveguides; ARROW-based optical accelerometers; Si; insertion losses; sensitivity; stress-free self-aligned quad beam accelerometer; waveguide core; wavelength visible range; Accelerometers; Electromagnetic waveguides; Integrated optics; Optical attenuators; Optical films; Optical losses; Optical refraction; Optical sensors; Optical waveguides; Silicon;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037262
