Title :
Smart silicon sensors - examples of Hall-effect sensors
Author :
de Jong, Paul C. ; Riedijk, Frank R. ; Van der Meer, Jeroen
Author_Institution :
Xensor Integration BV, Delft, Netherlands
Abstract :
In this paper, we discuss some of the trends in the industrial designs of smart sensor systems. High-performance sensor systems have been implemented by combining the sensing and signal processing functions on the same chip. Some applications of magnetic field measurements are discussed.
Keywords :
Hall effect transducers; elemental semiconductors; intelligent sensors; magnetic field measurement; silicon; Hall-effect sensors; Si; magnetic field measurements; signal processing functions; smart Si sensors; CMOS technology; Hall effect devices; Intelligent sensors; Magnetic field measurement; Magnetic sensors; Magnetic separation; Microcontrollers; Sensor systems; Silicon; Temperature sensors;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037334
