Title :
Fully CMOS compatible capacitive differential pressure sensors with on-chip programmabilities and temperature compensation
Author :
Trieu, H.K. ; Kordas, N. ; Mokwa, W.
Author_Institution :
Fraunhofer Inst. of Microelectron. Circuits & Syst., Duisburg, Germany
Abstract :
Describes the development and characterization of CMOS compatible surface micromachined capacitive differential pressure sensors with monolithic integrated electronics. Results from on-chip linearization, temperature compensation and investigation of humidity influence are presented.
Keywords :
CMOS integrated circuits; capacitive sensors; compensation; linearisation techniques; micromachining; microsensors; pressure sensors; CMOS compatible devices; capacitive differential pressure sensors; humidity; monolithic integrated electronics; on-chip linearization; on-chip programmabilities; surface micromachining; temperature compensation; CMOS process; Capacitive sensors; Electrodes; Etching; Fabrication; Passivation; Sensor arrays; Sensor phenomena and characterization; Silicon; Temperature sensors;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037336
